Heater of substrate processing apparatus



FIG. 1 is a front, top and right side perspective view of a heater of substrate processing apparatus showing our new design;

FIG. 2 is a rear, top and right side perspective view thereof;

FIG. 3 is a front elevational view thereof;

FIG. 4 is a rear elevational view thereof;

FIG. 5 is a left side elevational view thereof;

FIG. 6 is a right side elevational view thereof;

FIG. 7 is a top plan view thereof;

FIG. 8 is a bottom plan view thereof;

FIG. 9 is a cross-sectional view thereof taken in the direction of line 9-9 in FIG. 3;

FIG. 10 is an exploded cross-sectional view thereof taken in the direction of line 10-10 in FIG. 3 in order to show aspects of the design not otherwise apparent; and,

FIG. 11 is a cross-sectional view thereof taken in the direction of line 11-11 in FIG. 6.

The broken lines are included for the purpose of illustrating portions of the article that form no part of the claimed design. The dot-dash broken line arrows in the FIGS. 3 and 6 views are used to identify the cross section views, are for reference purposes only, and form no part of the claimed design. 

CLAIM We claim the ornamental design for a heater of substrate processing apparatus, as shown and described. 